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TiN coatings on M2 steel produced by plasma-assisted chemical vapor deposition

  • Published:1987-11 Issue:1-2 Volume:154 Page:377-386
  • ISSN:0040-6090
  • Container-title:Thin Solid Films
  • language:en
  • Short-container-title:Thin Solid Films

Author:

Hilton M.R.,Vandentop G.J.,Salmeron M.,Somorjai G.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Chemical vapor deposition of titanium nitride at low temperatures

2. Low Temperature Deposition of Metal Nitrides by Thermal Decomposition of Organometallic Compounds

3. The plasma-assisted chemical vapour deposition of TiC, TiN and TiCxN1−x

4. Proc. 165th Meet. of the Electrochemical Society;Kikuchi,1984

5. R. T. Wimber, Deere and Company Technical Center, Moline, IL, personal communication, April 1985.

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1. Surface modification of tool steel by cathodic cage TiN deposition;Surface Engineering;2019-09-11

2. Deposition of TiN, TiC, and DLC Coatings by PACVD;Production, Properties, and Applications of High Temperature Coatings;2018

3. Cathodic cage plasma deposition of TiN and TiO2 thin films on silicon substrates;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2015-07

4. Fabrication of Micro/Nanostructured Coatings by CVD Techniques;Comprehensive Materials Processing;2014

5. Characterization of Interfaces between HfO2Thin Film and Metal Electrode with Pre–Post Treatments;Japanese Journal of Applied Physics;2012-04-01
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