Depth profiling of thin films using a Grimm-type glow discharge lamp
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Glow‐discharge optical spectroscopy for the analysis of thin films
2. Glow discharge optical spectroscopy as an analytical depth profiling technique
3. In-Depth Compositional Profile Analysis of Alloys Using Optical Emission Glow Discharge Spectrography
4. Emission Spectrographic Analysis of Surfaces with an Ion-Sputtering Source
5. Eine neue glimmentladungslampe für die optische emissionsspektralanalyse
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