Glow‐discharge optical spectroscopy for the analysis of thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1662605
Reference9 articles.
1. Energy Distribution of Sputtered Cu Atoms
2. Time‐of‐Flight Method of Determining Velocities of Sputtered Atoms
3. Sputtering Thresholds and Displacement Energies
4. Sputtering Yields at Very Low Bombarding Ion Energies
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