Effects of acoustic wave irradiation on chemical vapour deposition

Author:

Sugiyama K.,Kinbara K.,Itoh H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. The fundamentals of chemical vapour deposition;Bryant;J. Mater. Sci.,1977

2. Chemical vapor deposition of titanium nitride on iron in an ultrasonic field;Takahashi;J. Electrochem. Soc.,1977

3. TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field;Takahashi;J. Mater. Sci.,1979

4. Ultrasonic chemical vapor deposition of TiB2 thick films;Takahashi;J. Cryst. Growth,1980

5. Study on growth rate and wear characteristics of chemically vapor deposited TiN, TiCxNy and TiC on cemented tungsten carbide;Cho,1981

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