Ultrasonic chemical vapor deposition of TiB2 thick films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference10 articles.
1. Chemical Vapor Deposition of Titanium Nitride on Iron in an Ultrasonic Field
2. TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field
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5. Morphology of chemical vapor deposited titanium diboride
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