Author:
Zhang Xiao-Qing,Wang Xiao-Li,Liu Ren
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference20 articles.
1. Characterization of a time multiplexed inductively coupled plasma etcher;Ayon;Journal of the Electrochemical Society,1999
2. High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine;Shan;Device and Process Technologies for MEMS, Microelectronics, and Photonics III,2004
3. Effects of process parameters on etching of deep Si trenches;Yang;Micronanoelectronic Technology,2009
4. Profile control of high aspect ratio trenches of silicon;Boufnichel;I. Effect of process parameters on local bowing. Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures),2002
5. Manufacturing effects in microfabricated gas bearings: Axially varying clearance;Piekos;Journal of Tribology-Transactions of the Asme,2002
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献