Manufacturing Effects in Microfabricated Gas Bearings: Axially Varying Clearance
Author:
Piekos E. S.1, Breuer K. S.2
Affiliation:
1. Department of Aeronautics and Astronautics, Massachusetts Institute of Technology, Cambridge, MA 02139 2. Brown University, Division of Engineering, Box D, 182 Hope Street, Providence, RI 02912
Abstract
The effect of axially-varying clearance on microfabricated gas journal bearings is explored. This variation commonly arises from difficulties inherent to etching deep, narrow channels. Two types of clearance variation commonly observed in etched bearings are investigated: taper and bow. Both shapes are shown to have a detrimental effect on load capacity and bearing stability compared to a cylindrical bearing with the minimum clearance. For the same variation magnitude, taper is shown to have a more serious effect, including complete closure of the stability corridor at low speed for some cases. Methods are suggested for estimating variable-clearance bearing performance using cylindrical bearing data.
Publisher
ASME International
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
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