Author:
Izumi Satoshi,Ping Chan Wee,Yamaguchi Makoto,Sakai Shinsuke,Ueda Yuzuru,Suzuki Atsushi
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference29 articles.
1. Silicon micromachined two-dimensional galvano optical scanner;Asada;IEEE Trans Magn,1994
2. Measurement of mechanical properties for MEMS materials;Yi;Meas Sci Technol,1999
3. Probabilistic Weibull behavior and mechanical properties of MEMS brittle materials;Jadaan;J Mater Sci,2003
4. Li X, Ono T, Wang Y, Esashi M. Study on ultra-thin NMES cantilevers-High yield fabrication and size-effect on young’s modulus of silicon. In: Proc IEEE Microelectromech Syst, Las Vegas, USA, 2002. p. 431–4.
5. The fracture strength of nitrogen doped silicon wafers;Vedde;Mater Sci Eng,1996
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