Composite complex agent based on organic amine alkali for BTA removal in post CMP cleaning of copper interconnection-Reference-Cited by-同舟云学术

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Composite complex agent based on organic amine alkali for BTA removal in post CMP cleaning of copper interconnection

Published:2022-04 Issue: Volume:910 Page:116187
ISSN:1572-6657
Container-title:Journal of Electroanalytical Chemistry
language:en
Short-container-title:Journal of Electroanalytical Chemistry

Author:

Yang Liu,Yin Da,Tan Baimei,Zhang Wenqian,Han Tiecheng,Zhao Peng,Wang Tongju,Liu Yawen

Funder

National Science and Technology Major Project

National Natural Science Foundation of China

Natural Science Foundation of Hebei Province

Publisher

Elsevier BV

Subject

Electrochemistry,General Chemical Engineering,Analytical Chemistry

Reference42 articles.

1. Effect of a novel chelating agent on defect removal during post-CMP cleaning;Hong;Appl. Surf. Sci.,2016

2. Study on the weakly alkaline slurry of copper chemical mechanical planarization for GLSI;Yao;ECS J. Solid State Sci. Technol.,2017

3. Review of corrosive environments for copper and its corrosion inhibitors;Fateh;Arabian J. Chem.,2020

4. Effect of arginine-based cleaning solution on BTA residue removal after Cu-CMP;Wang;Colloids Surf. A: Physicochem. Eng. Asp,2020

5. Effect of chelating agent on benzotriazole removal during post copper chemical mechanical polishing cleaning;Miao;Microelectron. Eng.,2014

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1. Azoles as corrosion inhibitors in alkaline medium for ruthenium chemical mechanical planarization applications:Electrochemical and theoretical analysis;Journal of Molecular Structure;2025-01

2. Corrosion inhibition performance and mechanism of nitrogen-containing organic compounds on copper in an alkaline slurry;Journal of Molecular Liquids;2024-03

3. Effects of two mild amino acids on benzotriazole residue desorption during cobalt post-chemical mechanical polishing cleaning: Experimental and theoretical studies;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2024-02

4. Diethylenetriamine and serine as synergists used in FA/OII based alkaline solution to realize enhanced cleaning efficiency of the organic corrosion inhibitor;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2023-10

5. Complexing agents for potassium oleate removal after cobalt chemical-mechanical polishing: Prediction, verification and mechanism;Journal of Molecular Liquids;2023-08

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