Optimal design of novel precursor materials for the atomic layer deposition using computer-aided molecular design
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Reference90 articles.
1. Atomic layer deposition of platinum thin films;Aaltonen;Chem. Mater.,2003
2. Titanium isopropoxide as a precursor for atomic layer deposition: Characterization of titanium dioxide growth process;Aarik;Appl. Surf. Sci.,2000
3. Atomic layer deposition of TiO2 from TiCl4 and O3;Aarik;Thin Solid Films,2013
4. Atomic layer deposition of TiO2 from tetrakis(dimethylamino) titanium and H2O;Abendroth;Thin Solid Films,2013
5. TiO2 anatase films obtained by direct liquid injection atomic layer deposition at low temperature;Avril;Appl. Surf. Sci.,2014
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