Microfabrication of membranes with extreme porosity and uniform pore size
Author:
Publisher
Elsevier BV
Subject
Filtration and Separation,Physical and Theoretical Chemistry,General Materials Science,Biochemistry
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3. Fabricatin of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography galvanoforming, and plastic moulding (LIGA process);Becket;Microelectron. Eng.,1986
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