Double layer ellipsometry: an efficient numerical method for data analysis
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference10 articles.
1. Ellipsometer Data Analysis with a Small Programmable Desk Calculator
2. Method for numerical inversion of the ellipsometry equation for transparent films
3. Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layer
4. Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputers
5. A new method for ellipsometric inversion with microcomputers: Characterization of optically absorbing films using multiple-angle-of-incidence
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1. Semi-analytical method for n–k inversion of ellipsometry data;Applied Optics;2019-01-23
2. Simulated annealing–simplex hybrid algorithm for ellipsometric data inversion of multilayer films;Review of Scientific Instruments;2013-06
3. Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor;The European Physical Journal Applied Physics;2004-11-23
4. A general-purpose software for optical characterization of thin films: specific features for microelectronic applications;Solid-State Electronics;2001-05
5. Ellipsometric methods for absorbing layers: a modified downhill simplex algorithm;Thin Solid Films;1996-11
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