Semi-analytical method for n–k inversion of ellipsometry data
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference40 articles.
1. Dielectric function representation by B-splines
2. Inversion of ellipsometry data using constrained spline analysis
3. Ellipsometer Data Analysis with a Small Programmable Desk Calculator
4. Method for numerical inversion of the ellipsometry equation for transparent films
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4. Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films;Journal of Vacuum Science & Technology B;2019-11
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