Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films

Published:2019-11 Issue:6 Volume:37 Page:062925
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Gilliot Mickaël¹,Hadjadj Aomar¹,Stchakovsky Michel²

Affiliation:

1. LISM, Université de Reims Champagne-Ardenne, Reims 51100, France

2. HORIBA France SAS, Palaiseau 91120, France

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5122737

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A fully automatized method for the unambiguous wavelength-by-wavelength determination of the thickness and optical property of a very thin film with a transparent range;Journal of Applied Physics;2023-07-24

2. Analysis of the temperature dependent optical properties of V1−xWxO2 thin films;Thin Solid Films;2023-05

3. Full-field film thickness measurement method based on reflection spectrum using AOTF;International Conference on Optical and Photonic Engineering (icOPEN 2022);2023-01-27

4. On the optimization of knot allocation for B-spline parameterization of the dielectric function in spectroscopic ellipsometry data analysis;Journal of Applied Physics;2021-01-21

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP