Secondary ion emission from silicon and silicon oxide
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference26 articles.
1. Mass and energy analysis of positive ions emitted from metallic targets bombarded by heavy ions in the keV energy region
2. Clusters sputtered from tungsten
3. Observation of clusters in a sputtering ion source
4. Energy distribution of secondary ions from 15 polycrystalline targets
5. Untersuchungen zur Emission positiver Sekundärionen aus festen Targets. Die Brauchbarkeit der Ionenbeschuß-Ionenquelle in der Massenspektroskopie
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