Author:
Wolters D.R.,Zegers-Van Duynhoven A.T.A.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
7 articles.
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1. A Self-Consistent Model for Thermal Oxidation of Silicon at Low Oxide Thickness;Advances in Condensed Matter Physics;2016
2. Silica on Silicon Carbide;Critical Reviews in Solid State and Materials Sciences;2008-02-13
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4. Ultrathin Dielectrics in Silicon Microelectronics;Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices;1998
5. On the Mechanism of Ultra Thin Silicon Oxide Film Growth During Thermal Oxidation;MRS Proceedings;1993