The physics of ONO layer dielectrics
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference18 articles.
1. 1984 IEDM Tech. Digest;Watanabe,1984
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3. ONO technology
4. 23rd Annual Proc. on Reliability Physics 1985;Watanabe,1985
5. Conduction properties of silicon dioxide in oxide-nitride-oxide structures
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