Geometric advection and its application in the emulation of high aspect ratio structures

Author:

Klemenschits XaverORCID,Selberherr SiegfriedORCID,Filipovic LadoORCID

Funder

Österreichische Forschungsförderungsgesellschaft

Publisher

Elsevier BV

Subject

Computer Science Applications,General Physics and Astronomy,Mechanical Engineering,Mechanics of Materials,Computational Mechanics

Reference64 articles.

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4. Hierarchical RLE level set : A compact and versatile deformable surface representation;Houston;ACM Trans. Graph.,2006

5. Guiding gate-etch process development using 3D surface reaction modeling for 7 nm and beyond;Dunn,2017

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