Process parameter selection study on SiNx:H films by PECVD method for silicon solar cells-Reference-Cited by-同舟云学术

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Process parameter selection study on SiNx:H films by PECVD method for silicon solar cells

Published:2015-01 Issue: Volume:111 Page:277-287
ISSN:0038-092X
Container-title:Solar Energy
language:en
Short-container-title:Solar Energy

Author:

Wu Xiaosong,Zhang Zaifang,Liu Yuan,Chu Xuening,Li Yupeng

Funder

Shanghai Science and Technology Innovation Action Plan, China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

General Materials Science,Renewable Energy, Sustainability and the Environment

Reference18 articles.

1. Silicon lifetime enhancement by SiNix:H anti-reflective coating deposed by PECVD using SiH4 and N2 reactive gas;Bousbih;Sol. Energy,2012

2. The study of the substrate temperature depended growth properties of microcrystalline silicon films deposited by VHF-PECVD method;Chen;Appl. Surf. Sci.,2013

3. Deposition pressure effects on material structure and performance of micromorph tandem solar cells;Delli Veneri;Renew. Energy,2008

4. Experimental study of the effect of process parameters on plasma-enhanced chemical vapour deposition of silicon nitride film;El Amrani;Vacuum,2011

5. Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties;Gorin;Opt. Exp.,2008

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1. Multilayer SiNx:H films as passivation and anti-reflection coating for industrial PERC solar cells;Optik;2022-10

2. Self-Attention-Augmented Generative Adversarial Networks for Data-Driven Modeling of Nanoscale Coating Manufacturing;Micromachines;2022-05-29

3. Multi-field simulation and optimization of SiNx:H thin-film deposition by large-size tubular LF-PECVD;Solar Energy;2021-11

4. An investigation on improving the homogeneity of plasma generated by linear microwave plasma source with a length of 1550 mm;Plasma Science and Technology;2021-01-15

5. Antireflective design of Si-based photovoltaics via biomimicking structures on black butterfly scales;Solar Energy;2020-07

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