Microcrystalline and micromorph device improvements through combined plasma and material characterization techniques-Reference-Cited by-同舟云学术

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Microcrystalline and micromorph device improvements through combined plasma and material characterization techniques

Published:2011-01 Issue:1 Volume:95 Page:134-137
ISSN:0927-0248
Container-title:Solar Energy Materials and Solar Cells
language:en
Short-container-title:Solar Energy Materials and Solar Cells

Author:

Bugnon G.,Feltrin A.,Bartlome R.,Strahm B.,Bronneberg A.C.,Parascandolo G.,Ballif C.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H2 discharges;Strahm;Plasma Sources Science and Technology,2007

2. Stress-induced nucleation of microcrystalline silicon from amorphous phase;Fujiwara;Japanese Journal of Applied Physics,2002

3. The physics of plasma-enhanced chemical vapour deposition for large-area coating: industrial application to flat panel displays and solar cells;Perrin;Plasma Physics and Controlled Fusion,2000

4. Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films;Bartlome;Applied Physics Letters,2009

5. Spectroscopic diagnostics and modelling of silane microwave plasmas;Fantz;Plasma Physics and Controlled Fusion,1998

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Disilane as a growth rate catalyst of plasma deposited microcrystalline silicon thin films;AIP Advances;2016-07

2. Impact of microcrystalline-silicon surface-morphology on film quality and solar cell performance;Japanese Journal of Applied Physics;2014-08-06

3. Recent progress of high efficiency Si thin-film solar cells in large area;Progress in Photovoltaics: Research and Applications;2014-05-29

4. n-Type microcrystalline silicon oxide layer and its application to high-performance back reflectors in thin-film silicon solar cells;Current Applied Physics;2013-06

5. High-rate deposition of microcrystalline silicon thin film by multi-step method;Acta Physica Sinica;2012

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