The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy

Published:2004-02 Issue:1 Volume:450 Page:79-83
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Montgomery P.C.,Montaner D.,Manzardo O.,Flury M.,Herzig H.P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Testing micro devices with fringe projection and white-light interferometry

2. Rapid prototyping of diffractive optical elements for high-power lasers using laser ablation lithography fabrication and coherence probe microscopy analysis

3. Interferometric profiler for rough surfaces

4. Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

5. Near Field Optics and Nanoscopy;Fillard,1996

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 基于FDTD的高深宽比沟槽结构低相干显微干涉信号仿真分析;ACTA PHOTONICA SINICA;2023

2. 低相干干涉高深宽比结构高度检测信号处理技术;ACTA PHOTONICA SINICA;2022

3. Variations in the appearance quality of brown rice during the four stages of milling;Journal of Cereal Science;2021-11

4. MOEMS and MEMS - Technology, Benefits & Uses;Portable Spectroscopy and Spectrometry;2021-05-07

5. White light interference microscopy system design;Optics and Photonics for Advanced Dimensional Metrology;2020-04-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3