Estimation of hydrogen radical density generated from various kinds of catalysts-Reference-Cited by-同舟云学术

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Estimation of hydrogen radical density generated from various kinds of catalysts

Published:2009-04 Issue:12 Volume:517 Page:3449-3451
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Abe K.,Ida M.,Izumi A.,Terashima S.,Sudo T.,Watanabe Y.,Fukuda Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Insertion of EUVL into high-volume manufacturing

2. Damage-resistant and low stress EUV multilayer mirrors

3. Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer

4. Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

5. Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

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1. Fabrication of nanographene using nickel supported by a tungsten mesh;Thin Solid Films;2019-09

2. Facile and Efficient Atomic Hydrogenation Enabled Black TiO 2 with Enhanced Photo‐Electrochemical Activity via a Favorably Low‐Energy‐Barrier Pathway;Advanced Energy Materials;2019-07-25

3. Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD;Catalytic Chemical Vapor Deposition;2019-02-15

4. Photoresist removal using hydrogen radicals produced by tantalum hot-wire catalyst;NANOSCIENCE AND NANOTECHNOLOGY: NANO-SciTech;2019

5. A review on the recent progress, challenges, and perspectives of atmospheric-pressure cold plasma for preparation of supported metal catalysts;Plasma Processes and Polymers;2018-03-23

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