Spectroscopic ellipsometry study on e-beam deposited titanium dioxide films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Titanium oxide films on Si(100) deposited by e-beam evaporation
2. Thickness-dependent crystallinity of sputter-deposited titania
3. In situ growth of evaporated TiO2 thin films using oxygen radicals: Effect of deposition temperature
4. Deposition at low substrate temperatures of high-quality TiO_2 films by radical beam–assisted evaporation
5. On the optical constants of TiO2 thin films. Ellipsometric studies
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