Optical and electronic properties of transparent conducting Ta:TiO2 thin and ultra-thin films: the effect of doping and thickness

Author:

Bricchi Beatrice R.1ORCID,Sygletou Maria2ORCID,Ornago Luca13,Terraneo Giancarlo45ORCID,Bisio Francesco6,Mancarella Cristina1ORCID,Stasi Lorenzo1,Rusconi Francesco7,Mogni Erika7,Ghidelli Matteo18,Biagioni Paolo7ORCID,Li Bassi Andrea15ORCID

Affiliation:

1. Micro- and Nanostructured Materials Laboratory, Department of Energy, Politecnico di Milano, via Ponzio 34/3, 20133 Milano, Italy

2. OptMatLab, Dipartimento di Fisica, Università di Genova, via Dodecaneso 33, I-16146, Genova, Italy

3. Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands

4. Laboratory of Supramolecular and Bio-Nanomaterials, Department of Chemistry, Materials, and Chemical Engineering “Giulio Natta”, Politecnico di Milano, Via L. Mancinelli 7, 20133 Milano, Italy

5. Center for Nanoscience and Technology – IIT@Polimi, via Giovanni Pascoli 70/3, 20133, Milano, Italy

6. CNR-SPIN, C. so Perrone 24, 16152 Genova, Italy

7. Department of Physics, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy

8. Laboratoire des Sciences des Procédés et des Matériaux (LSPM), CNRS, Université Sorbonne Paris Nord, 93430 Villetaneuse, France

Abstract

The evolution of optical and electronic properties of Ta-doped TiO2 films is investigated as thickness is decreased to 5 nm and as a function of Ta doping. The correlation with structural properties is discussed, showing a high degree of tunability.

Funder

H2020 Marie Skłodowska-Curie Actions

Publisher

Royal Society of Chemistry (RSC)

Subject

Microbiology

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