Author:
Park Kwangchol,Yun Won-Deok,Choi Byoung-Jun,Kim Heon-Do,Lee Won-Jun,Rha Sa-Kyun,Park Chong Ook
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. SiliconVLSI Technology;Plummer,2000
2. in Technical Digest of 2002 International Electron Devices Meeting, IEEE;Park,2002
3. Atomic layer deposition (ALD): from precursors to thin film structures
4. Atomic Layer Deposition for Nanotechnology;Sherman,2008
Cited by
51 articles.
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