Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition-Reference-Cited by-同舟云学术

Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

Published:2011-03 Issue:10 Volume:519 Page:3011-3020
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Barve S.A.,Jagannath ,Mithal N.,Deo M.N.,Biswas A.,Mishra R.,Kishore R.,Bhanage B.M.,Gantayet L.M.,Patil D.S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Growth and characterization of Y2O3 thin films

2. Water absorption and interface reactivity of yttrium oxide gate dielectrics on silicon

3. Structural transition of crystalline Y2O3 film on Si(111) with substrate temperature

4. Low-temperature growth of Y 2 O 3 thin films by ultraviolet-assisted pulsed laser deposition

5. Structural, optical and electrical characteristics of yttrium oxide films deposited by laser ablation

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of O2/Ar ratio on the microstructure and tribological properties of Y2O3 films by multi-arc ion plating;Ceramics International;2024-08

2. Influence of the yttrium cathode arc current on the yttrium content in the (Ti,Y,Al)N coating and the coating properties;Vacuum;2024-04

3. Investigation of the Properties of Multilayer Nanostructured Coating Based on the (Ti,Y,Al)N System with High Content of Yttrium;Coatings;2023-02-01

4. Influence of the Yttrium Cathode Arc Current on the Yttrium Content in the (Ti,Y,Al)N Coating and the Coating Properties;2023

5. A remarkable effect of substrate temperature on novel Al/Y2O3/n-Si heterojunction diodes performance fabricated by facile jet nebulizer spray pyrolysis for optoelectronic applications;Chinese Journal of Physics;2022-01