Stabilized formation of tetragonal ZrO2 thin film with high permittivity-Reference-Cited by-同舟云学术

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Stabilized formation of tetragonal ZrO2 thin film with high permittivity

Published:2014-04 Issue: Volume:557 Page:192-196
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kato Kimihiko^ORCID,Saito Takatoshi,Shibayama Shigehisa,Sakashita Mitsuo,Takeuchi Wakana,Taoka Noriyuki,Nakatsuka Osamu,Zaima Shigeaki

Funder

Grant-in-Aid for Specially Promoted Research

Ministry of Education, Culture, Sports, Science and Technology of Japan

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)

2. Rare Earth Oxide Thin Films;Scarel,2005

3. The dielectric properties of zirconia

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