Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition-Reference-Cited by-同舟云学术

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Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition

Published:2016-10 Issue: Volume:617 Page:138-142
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lo Nigro Raffaella,Schilirò Emanuela,Greco Giuseppe,Fiorenza Patrick,Roccaforte Fabrizio

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. High-k gate dielectrics: current status and materials properties considerations;Wilk;J. Appl. Phys.,2001

2. Alternative dielectrics to silicon oxides for memory and logic devices;Kingon;Nature,2000

3. Fundamental of physical limitations in integrated electronic circuits;Wallmark;Inst. Phys. Conf. Ser.,1975

4. CMOS design near the limit of scaling;Taur;IBM J. Res. Dev.,2002

5. GaN-based RF power devices and amplifiers;Mishra;Proc. IEEE,2008

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Temperature and time dependent electron trapping in Al2O3 thin films onto AlGaN/GaN heterostructures;Applied Surface Science;2022-03

2. Early Growth Stages of Aluminum Oxide (Al2O3) Insulating Layers by Thermal- and Plasma-Enhanced Atomic Layer Deposition on AlGaN/GaN Heterostructures;ACS Applied Electronic Materials;2021-12-29

3. Forward and reverse current transport mechanisms in tungsten carbide Schottky contacts on AlGaN/GaN heterostructures;Journal of Applied Physics;2021-06-21

4. Correlating electron trapping and structural defects in Al2O3 thin films deposited by plasma enhanced atomic layer deposition;AIP Advances;2020-12-01

5. Growth of Ultrathin Al2O3 Films on n-InP Substrates as Insulating Layers by RF Magnetron Sputtering and Study on the Optical and Dielectric Properties;Coatings;2019-05-26

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