Synthesis and characterization of silica aerogel films for inter-metal dielectrics via ambient drying-Reference-Cited by-同舟云学术

Synthesis and characterization of silica aerogel films for inter-metal dielectrics via ambient drying

Published:2004-07 Issue:1-2 Volume:460 Page:190-200
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kim Gun S.,Hyun Sang H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. L.W. Hrubesh, in: T.M. Lu, S.P. Murarka, T.S. Kuan, C.H. Ting (Eds.), Low-dielectric constant materials–synthesis and applications in microelectronics, San Francisco, USA, April 17–19, 1995, Materials Research Society Symposium Proceedings 381 (1995) 267

2. L.W. Hrubesh, J.F. Poco, in: S. Komarneni, D.M. Smith, J.S. Beck (Eds.), Advanced in porous materials, Boston, USA, November 28–December 1, 1994, Materials Research Society Symposium Proceedings 371 (1995) 195

3. SiO2 aerogel film as a novel intermetal dielectric

4. Synthesis and Characterization of Low-Dielectric Silica Aerogel Films

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