Synthesis and Characterization of Low-Dielectric Silica Aerogel Films
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.2000.tb01230.x/fullpdf
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3. Dielectric Properties of Aerogels;Hurbesh;J. Mater. Res.,1993
4. Methods and Needs for Low k Material Research;Ting;Mater. Res. Soc. Symp. Proc.,1995
5. Investigations of the Low Dielectric Constant Fluorinated Polyimide for Use as the Interlayer Dielectric in ULSI;Lee;Mater. Res. Soc. Symp. Proc.,1995
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