Ultralow dielectric cross-linked silica aerogel nanocomposite films for interconnect technology-Reference-Cited by-同舟云学术

Ultralow dielectric cross-linked silica aerogel nanocomposite films for interconnect technology

Published:2022-08 Issue: Volume:28 Page:101536
ISSN:2352-9407
Container-title:Applied Materials Today
language:en
Short-container-title:Applied Materials Today

Author:

Choi Haryeong,Kim Taehee,Kim Taeho^ORCID,Moon Sunil,Yoo SangHyuk,Parale Vinayak G.^ORCID,Dhavale Rushikesh P.^ORCID,Kang Keonwook^ORCID,Sohn Hyunchul,Park Hyung-Ho^ORCID

Publisher

Elsevier BV

Subject

General Materials Science

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4. Thin aerogel films for optical, thermal, acoustic and electronic applications;Hrubesh;J. NonCryst. Solids,1995

5. Ultralow-dielectric-constant amorphous boron nitride;Hong;Nature,2020

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