Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
9 articles.
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1. Analysis of stress in sputter-deposited films using a kinetic model for Cu, Ni, Co, Cr, Mo, W;Applied Surface Science;2023-03
2. Analysis of Stress in Sputter-Deposited Films Using a Kinetic Model for Cu, Ni, Co, Cr, Mo, W;SSRN Electronic Journal;2022
3. Molecular dynamics simulation of stress induced by energetic particle bombardment in Mo thin films;Materialia;2021-05
4. Effect of synchronized bias in the deposition of TiB2 thin films using high power impulse magnetron sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2018-05
5. Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models;Journal of Applied Physics;2016-05-21