Funder
National Development Agency
TAMOP
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference44 articles.
1. Spectroscopic Ellipsometry: Principles and Applications;Fujiwara,2007
2. Handbook of Ellipsometry,2005
3. Ellipsometry at the Nanoscale,2013
4. Spectroellipsometric characterization of ion implanted semiconductors and porous silicon;Lohner;Acta Phys. Slovaca,1998
5. Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy;Serényi;Thin Solid Films,2007
Cited by
15 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献