Effects of Laser in situ annealing on crystal quality of NiSi film grown on Si(001) substrate-Reference-Cited by-同舟云学术

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Effects of Laser in situ annealing on crystal quality of NiSi film grown on Si(001) substrate

Published:2010-05 Issue:14 Volume:518 Page:3646-3649
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Wan Li,Zhang Xuefei,Tang Bo,Ren Yiming,Cheng Xinhong,Xu Dapeng,Luo Hijun,Huang Yunmi

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Silicides for VLSI Applications;Murarka,1983

2. Salicides: materials, scaling and manufacturability issues for future integrated circuits (invited)

3. Enhancement of thermal stability of NiSi films on (100)Si and (111)Si by Pt addition

4. Micro-Raman spectroscopic investigation of NiSi films formed on BF2 +-, B+- and non-implanted (100)Si substrates

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reaction Kinetics Investigation of Ni Ohmic Contacts on N-Type 4H-SiC;Key Engineering Materials;2023-07-31

2. Influence of catalyst layer thickness on the growth of nickel silicide nanowires and its application for Li-ion batteries;Journal of Power Sources;2014-01

3. The Cycling Performance and Surface Passivation Qualities of a Heterogeneous Amorphous NixSiOy/Polycrystalline NiSi2Core Shell Nanowire Used as a Li-Ion Battery Anode;Journal of The Electrochemical Society;2014

4. Properties of a Ni-FUSI gate formed by the EBV method and one-step RTA;Journal of Semiconductors;2012-03

5. Fast growth of branched nickel monosilicide nanowires by laser-assisted chemical vapor deposition;Nanotechnology;2011-04-07

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