Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures-Reference-Cited by-同舟云学术

Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

Published:2014-07 Issue: Volume:562 Page:331-337
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Vähä-Nissi Mika,Pitkänen Marja,Salo Erkki,Kenttä Eija,Tanskanen Anne,Sajavaara Timo,Putkonen Matti,Sievänen Jenni,Sneck Asko,Rättö Marjaana,Karppinen Maarit,Harlin Ali

Funder

Finnish Funding Agency for Technology and Innovation (TEKES)

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference45 articles.

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4. Nucleation and growth during Al2O3 atomic layer deposition on polymers;Wilson;Chem. Mater.,2005

5. Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through;Grigoras;Thin Solid Films,2008

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