Properties of zirconium oxide films prepared by filtered cathodic vacuum arc deposition and pulsed DC substrate bias
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Structure and properties of zirconium oxide thin films prepared by filtered cathodic vacuum arc
2. Identification of tetragonal and cubic structures of zirconia using synchrotron x-radiation source
3. Modification of the optical and structural properties of dielectric ZrO2films by ion‐assisted deposition
4. The crystallization of amorphous ZrO2 by thermal heating and by ion bombardment
5. Review of the filtered vacuum arc process and materials deposition
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