Nonlinear effects in low-energy ion sputtering of solids-Reference-Cited by-同舟云学术

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Nonlinear effects in low-energy ion sputtering of solids

Published:2020-09 Issue:5 Volume:38 Page:053203
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kudriavtsev Yuriy¹^ORCID,Asomoza Rene¹,Hernandez Angelica²^ORCID,Kazantsev Dmitry Yu.³,Ber Boris Ya.³^ORCID,Gorokhov Alexander N.³

Affiliation:

1. Departamento Ingeniería Eléctrica—SEES, CINVESTAV-IPN, Ciudad de México 07360, Mexico

2. Tepeji del Río de Ocampo, Autonomous Hidalgo State University, Hidalgo 42855, Mexico

3. Quantum-size Heterostructures Laboratory, Centre of Nanoheterostructure Physics, Ioffe Institute, St. Petersburg, 194021, Russia

Funder

SEP-Cinvestav

Russian Ministry of Science

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000262

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