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Viscoelastic mechanical properties measurement of thin Al and Al–Mg films using bulge testing

  • Published:2016-11 Issue: Volume:618 Page:2-7
  • ISSN:0040-6090
  • Container-title:Thin Solid Films
  • language:en
  • Short-container-title:Thin Solid Films

Author:

Huang An-Wen,Lu Cheng-Hua,Wu Shao-Chi,Chen Tzu-Ching,Vinci Richard P.,Brown Walter L.,Lin Ming-Tzer

Funder

National Science Foundation

Taiwan Ministry of Science and Technology

Ministry of Education, Taiwan

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Creep characterization of Al alloy thin films for use in MEMS applications;Modlinski;Microelectron. Eng.,2004

2. Stress relaxation in thin aluminium films;Hershkovitz;Thin Solid Films,1985

3. Anelastic contributions to the behavior of freestanding Al thin films;Vinci,1999

4. Stress relaxation of freestanding aluminum beams for microelectromechanical systems applications;Lee;Appl. Phys. Lett.,2000

5. Young's modulus measurements and grain boundary sliding in free-standing thin metal films;Kalkman;Appl. Phys. Lett.,2001

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