XPS investigation of 5N purity Al thin foils for MEMS devices-Reference-Cited by-同舟云学术

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XPS investigation of 5N purity Al thin foils for MEMS devices

Published:2022-09-14 Issue: Volume: Page:
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surface & Interface Analysis

Author:

Bolli Eleonora¹²^ORCID,Kaciulis Saulius²^ORCID,Mezzi Alessio²^ORCID,Montanari Roberto¹^ORCID,Varone Alessandra¹^ORCID

Affiliation:

1. Dipartimento di Ingegneria Industriale Università di Roma “Tor Vergata” Rome Italy

2. ISMN—CNR Montelibretti Italy

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sia.7150

Reference37 articles.

1. Sample Dimensions Influence Strength and Crystal Plasticity

2. Size dependency of mechanical properties of high purity aluminium foils

3. The effect of grain size on viscoelastic relaxation behavior of Au thin films

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