Funder
National Research Foundation of Korea
Korea government
Ministry of Trade, Industry & Energy
Korea Semiconductor Research Consortium
Ministry of Education and National Research Foundation of Korea
Air Liquide
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference60 articles.
1. I.S. Devised, I. For, T. Assessment, I.S. Without, R. To, C. Considerations, P. To, I. Products, O.R. Equipment, I Nternational T Echnology R Oadmap for, 2015.
2. The role of the HfO2-TiN interface in capacitance-voltage nonlinearity of metal-insulator-metal capacitors;Wenger;Thin Solid Films,2009
3. Seed layer and multistack approaches to reduce leakage in SrTiO3-based metal-insulator-metal capacitors using TiN bottom electrode;Menou;Jpn. J. Appl. Phys.,2010
4. Atomic Vapor Depositions of Ti-Ta-O thin films for Metal-Insulator-Metal applications;Lukosius;Thin Solid Films,2011
5. Impact of interface variations on J–V and C–V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1-x)AlxO2 films;Weinreich;Microelectron. Eng.,2009
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献