Pressure dependence of (Ti, Al)N film growth on inner walls of small holes in high-power impulse magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Directional and preferential sputtering-based deposition;Rossnagel;Thin Solid Films,1995
2. High power impulse magnetron sputtering discharge;Gudmundsson;J. Vac. Sci. Technol. A,2012
3. A novel pulsed magnetron sputter technique utilizing very high target power densities;Kouznetsov;Surf. Coat. Technol.,1999
4. Ionized physical vapor deposition (IPVD): a review of technology and applications;Helmersson;Thin Solid Films,2006
5. Ion-assisted physical vapor deposition for enhanced film properties on nonflat surfaces;Alami;J. Vac. Sci. Technol.,2005
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