Ion-assisted physical vapor deposition for enhanced film properties on nonflat surfaces-Reference-Cited by-同舟云学术

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Ion-assisted physical vapor deposition for enhanced film properties on nonflat surfaces

Published:2005-03 Issue:2 Volume:23 Page:278-280
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Alami J.,Persson P. O. Å.,Music D.,Gudmundsson J. T.,Bohlmark J.,Helmersson U.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1861049

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