Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry-Reference-Cited by-同舟云学术

Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Published:2019-06 Issue: Volume:680 Page:94-101
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Tryus Maksym^ORCID,Nikolaev Konstantin V.,Makhotkin Igor A.,Schubert Jürgen,Kibkalo Lidia,Danylyuk Serhiy,Giglia Angelo,Nicolosi Piergiorgio^ORCID,Juschkin Larissa

Funder

EU FP7

University of Twente

ASML

Carl Zeiss SMT GmbH

PANalytical

Province of Overijssel

NWO

Helmholtz Association

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference38 articles.

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3. Optical response near the soft X-ray absorption edges and structural studies of low optical contrast system using soft X-ray resonant reflectivity;Nayak;J. Atomic Mol. Optic. Phys.,2011

4. XUV metrology: surface analysis with extreme ultraviolet radiation;Banyay;Proc. SPIE,2009

5. Multi-angle spectroscopic extreme ultraviolet reflectometry for analysis of thin films and interfaces;Danylyuk;Phys. Status Solidi C,2015

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