Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry
Author:
Funder
EU FP7
University of Twente
ASML
Carl Zeiss SMT GmbH
PANalytical
Province of Overijssel
NWO
Helmholtz Association
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference38 articles.
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3. Optical response near the soft X-ray absorption edges and structural studies of low optical contrast system using soft X-ray resonant reflectivity;Nayak;J. Atomic Mol. Optic. Phys.,2011
4. XUV metrology: surface analysis with extreme ultraviolet radiation;Banyay;Proc. SPIE,2009
5. Multi-angle spectroscopic extreme ultraviolet reflectometry for analysis of thin films and interfaces;Danylyuk;Phys. Status Solidi C,2015
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup;Optics Express;2020-06-25
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