On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers-Reference-Cited by-同舟云学术

On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers

Published:2014-05 Issue: Volume:558 Page:54-61
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

van Assche Ferdinandus J.H.^ORCID,Unnikrishnan Sandeep,Michels Jasper J.,van Mol Antonius M.B.,van de Weijer Peter,van de Sanden Mauritius C.M.,Creatore Mariadriana

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference46 articles.

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3. Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition

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5. Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates

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