Plasma-deposited passivation layers for moisture and water protection
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. Silicon nitride from microwave plasma: fabrication and characterization
2. Behavior of a ‐ SiN : H and a ‐ SiON : H Films in Condensed Water
3. Particulate generation in silane/ammonia rf discharges
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