Selective removal of variable thickness multilayer materials based on photoelectric detection

Author:

Feng Yingbo,Yang Hengfeng,Shen Hong,Zhou Jing

Publisher

Elsevier BV

Reference20 articles.

1. First demonstration of Ultra-Miniaturized, high-performance filters on Alumina Ribbon ceramic substrates for 5G applications;Aslani-Amoli,2022

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3. Dry etching of copper thin films in high density plasma of CH3COOH/Ar;Ryu;Thin Solid Films,2019

4. High‐Q thin‐Film Lithium Niobate Microrings fabricated with wet etching;Zhuang;Adv Mater,2023

5. Selective chemical wet etching of Si1-xGex versus Si in single-layer and multi-layer with HNO3/HF mixtures;Choi;Thin Solid Films,2020

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