Development of binder-free CMG abrasive pellet and finishing performance on mono-crystal sapphire-Reference-Cited by-同舟云学术

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Development of binder-free CMG abrasive pellet and finishing performance on mono-crystal sapphire

Published:2020-03 Issue: Volume:62 Page:40-46
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Wang Jianbin,Wu Ke,Maezaki Tomohiro,Zhou Libo,Onuki Teppei,Shimizu Jun,Zhu Yongwei

Funder

JSPS

Natural Science Foundation of Anhui Province

Natural Science Foundation of Anhui Provincial Education Department

National Natural Science Foundation of China Pre-research Project

Publisher

Elsevier BV

Subject

General Engineering

Reference21 articles.

1. Modern trends in crystal growth and new applications of sapphire;Akselrod;J Cryst Growth,2012

2. Effects of surface treatment on sapphire substrates;Wang;J Cryst Growth,2005

3. Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms;Zhou;Colloid Surf Physicochem Eng Asp,2017

4. Preparation of La-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates;Lei;Precis Eng,2016

5. Nd3+-doped colloidal SiO2 composite abrasives: Synthesis and the effects on chemical mechanical polishing (CMP) performances of sapphire wafers;Liu;Appl Surf Sci,2017

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Residual stress and subsurface damage in sapphire ultra-precision grinding;Journal of Materials Processing Technology;2024-07

2. Ultra-low damage processing of silicon wafer with an innovative and optimized nonwoven grind-polishing wheel;Precision Engineering;2024-06

3. Study on subsurface damage behavior in ductile ultra-precision grinding of sapphire based on acoustic emission signal processing;Journal of Manufacturing Processes;2024-01

4. Mechanical effect of abrasives on silicon surface in chemo-mechanical grinding;International Journal of Mechanical Sciences;2023-11

5. Characteristics of textured polishing wheels for dry fixed abrasive polishing fused silica;Applied Optics;2023-07-12

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