Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Characterization of sapphire chemical mechanical polishing performances using silica with different sizes and their removal mechanisms

Published:2017-01 Issue: Volume:513 Page:153-159
ISSN:0927-7757
Container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects
language:en
Short-container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects

Author:

Zhou Yan,Pan Guoshun,Gong Hua,Shi Xiaolei,Zou Chunli

Funder

National Natural Science Foundation of China

National Key Basic Research Program of China

Foundation for Innovative Research Groups of the National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Colloid and Surface Chemistry

Reference22 articles.

1. Investigation of nanopatterned c-plane sapphire Substrates for Growths of polar and nonpolar GaN epilayers

2. Surface Modification of Sapphire by Magnesium-Ion Implantation

3. Two-Step Chemical Mechanical Polishing of Sapphire Substrate

Cited by 48 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research on composite pattern design and lapping performance of fixed abrasive pads controlled by multi-physical fields;Precision Engineering;2024-12

2. Advanced polishing methods for atomic-scale surfaces: A review;Materials Today Sustainability;2024-09

3. Influences of ultrasonic vibration directions, amplitudes, and frequencies on sapphire polishing studied by molecular dynamics;Precision Engineering;2024-09

4. Characterization of Polish-Induced Gouges on Single Crystal Sapphire Substrates;ECS Journal of Solid State Science and Technology;2024-05-01

5. Effect of Viscoelastic Characteristics on the Real Contact Area of Polishing Pad Surface;ECS Journal of Solid State Science and Technology;2024-04-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3