Design of a redundant actuated 4-PPR planar 3-DOF compliant nanopositioning stage-Reference-Cited by-同舟云学术

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Design of a redundant actuated 4-PPR planar 3-DOF compliant nanopositioning stage

Published:2023-07 Issue: Volume:82 Page:68-79
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Yang Miao,Sun Mingyang,Wu Zhe,Li Jianhua,Long Yi

Funder

National Natural Science Foundation of China

Harbin Institute of Technology

Natural Science Foundation of Zhejiang Province

State Key Laboratory of Robotics and System

Science and Technology Planning Project of Guangdong Province

Publisher

Elsevier BV

Subject

General Engineering

Reference35 articles.

1. Development of nanopositioning mechanism with real-time compensation algorithm to improve the positional accuracy of a linear stage;Lee;Precis Eng,2017

2. Optimal design, modeling and control of a long stroke 3-PRR compliant parallel manipulator with variable thickness flexure pivots;Miao;Robot Comput Integrated Manuf,2019

3. A constraint-flow based method of synthesizing XYθ compliant parallel mechanisms with decoupled motion and actuation characteristics;Li,2022

4. A flexure-based parallel actuation dual-stage system for large-stroke nanopositioning;Zhu;IEEE Trans Ind Electron,2017

5. Pressure-fed mechanism to compensate for motions and dynamic characteristics of compliant nanopositioning stages;Chun;Precis Eng,2020

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey;International Journal of Extreme Manufacturing;2024-09-12

2. Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage;Journal of Micromechanics and Microengineering;2024-07-11

3. Modeling and control for a long-stroke 4-PPR compliant parallel mechanism;International Journal of Intelligent Robotics and Applications;2024-02-28

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