Study on the finishing capability and abrasives-sapphire interaction in dry chemo-mechanical-grinding (CMG) process-Reference-Cited by-同舟云学术

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Study on the finishing capability and abrasives-sapphire interaction in dry chemo-mechanical-grinding (CMG) process

Published:2018-04 Issue: Volume:52 Page:451-457
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Wu Ke,Zhou Libo,Onuki Teppei,Shimizu Jun,Yamamoto Takeyuki,Yuan Julong

Funder

JSPS KAKENHI, Grant-in-Aid for Scientific Research

Challenging Exploratory Research

NIMS microstructural characterization platform

Nanophoton Corporation, Japan

Publisher

Elsevier BV

Subject

General Engineering

Reference43 articles.

1. Sapphirse: material, manufacturing, applications;Dobrovinskaya,2009

2. Machining processes for sapphire wafers: a literature review;Li;Proc Inst Mech Eng, B J Eng Manuf,2011

3. Epitaxy of m-plane GaN on nanoscale patterned c-plane sapphire substrates;Lin;Surf Sci,2012

4. Highly efficient and reliable high power LEDs with patterned sapphire substrate and strip-shaped distributed current blocking layer;Zhou;Appl Surf Sci,2015

5. A comparative study on the properties of c-plane and a-plane GaN epitaxial films grown on sapphire substrates by pulsed laser deposition;Wang;Vacuum,2016

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface roughness and fracture cracks of Al2O3/TiO2 composite coating by wet chemical mechanical grinding with structured abrasives pad;Journal of Materials Research and Technology;2024-09

2. Study on the Fabrication and Grinding Performance of the Self-sharpening Cr2O3 Gel Abrasive Tool;International Journal of Precision Engineering and Manufacturing;2024-01-23

3. Study on subsurface damage behavior in ductile ultra-precision grinding of sapphire based on acoustic emission signal processing;Journal of Manufacturing Processes;2024-01

4. Study on Polysaccharide Bonded Abrasive Tool Using Hydrothermal Gelatinisation for Green Machining of Single Crystal Sapphire;International Journal of Precision Engineering and Manufacturing;2023-11-13

5. Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing;Micromachines;2023-09-20

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